Extreme ultraviolet lithography (EUVL, also known simply as EUV) is a new technology used in the semiconductor industry for manufacturing integrated circuits...

semiconductor industry and the sole supplier in the world of extreme ultraviolet lithography (EUV) photolithography machines that are required to manufacture...

the terms. The main uses of extreme ultraviolet radiation are photoelectron spectroscopy, solar imaging, and lithography. In air, EUV is the most highly...

including ultraviolet lithography, deep ultraviolet lithography, extreme ultraviolet lithography (EUVL), and X-ray lithography. The wavelength of light...

wavelength bands in the UV spectrum. 13.5 nm: Extreme ultraviolet lithography 30–200 nm: Photoionization, ultraviolet photoelectron spectroscopy, standard integrated...

generate secondary electrons as in the cases of extreme ultraviolet lithography and electron beam lithography. While the fine pattern definition is due principally...

laser lithography has enabled transistor feature sizes to shrink from 800 nanometers in 1990 to 7 nanometers in 2018. Extreme ultraviolet lithography machines...

from 0 to as high as 50 nm (see section New frontiers and extreme ultraviolet lithography). Hence, resist-substrate charging is not repeatable and is...

set include multiphoton lithography, X-Ray lithography, light coupling nanolithography (LCM), and extreme ultraviolet lithography (EUVL). This last technique...

they had taped out 3nm test chips, using extreme ultraviolet lithography (EUV) and 193 nm immersion lithography. In early 2019, Samsung presented plans...