Photolithography (also known as optical lithography) is a process used in the manufacturing of integrated circuits. It involves using light to transfer...

need for costly vacuum chambers. Significant examples include 193-nm photolithography equipment (for semiconductor manufacturing) and circular dichroism...

created by a photographic process, a method that may be referred to as "photolithography" (although the term usually refers to a vaguely similar microelectronics...

shine through in a defined pattern. Photomasks are commonly used in photolithography for the production of integrated circuits (ICs or "chips") to produce...

Photolithography is a process in removing select portions of thin films used in microfabrication. Microfabrication is the production of parts on the micro-...

the resolution attainable through photolithography. Computational lithography came to the forefront of photolithography technologies in 2008 when the semiconductor...

range. ArF (and KrF) excimer lasers are widely used in high-resolution photolithography machines, a critical technology for microelectronic chip manufacturing...

in 1984. ASML specializes in the development and manufacturing of photolithography machines which are used to produce computer chips. As of 2023[update]...

resist) is a light-sensitive material used in several processes, such as photolithography and photoengraving, to form a patterned coating on a surface. This...

(EGS) or other semiconductor (such as GaAs) through processes such as photolithography. The wafer is cut (diced) into many pieces, each containing one copy...