Optical proximity correction (OPC) is a photolithography enhancement technique commonly used to compensate for image errors due to diffraction or process...

to a few square micrometres of resist. Commercial full-chip optical proximity correction (OPC), using model forms, was first implemented by TMA (now a...

produce photomasks (Eventually this whole process was replaced by the optical pattern generator to produce the master image). At this point the master...

solution does not exist. In conventional approaches known as the optical proximity correction (OPC) a "target" shape is augmented with carefully tuned rectangles...

up OPC in Wiktionary, the free dictionary. OPC may refer to: Optical proximity correction Ordinary Portland cement Organic Photo Conductor, an element...

includes resolution enhancement technologies (RET), such as optical proximity correction (OPC) which corrects for the wave-like behavior of light when...

semiconductor industry. At the centre of the litigation was Optical proximity correction (OPC) software needed for lithography machines to print tiny...

increasing the quality of the final photomask. This also includes optical proximity correction (OPC) or inverse lithography technology (ILT) – the up-front...

gradually progressed to deep-UV immersion lithography using optical proximity correction, inverse lithography technology, off-axis illumination, phase-shift...

Use of 300 mm wafer size Use of KrF (248 nm) lithography with optical proximity correction 512 Mbit 1.8 V operation Derivative of earlier 110 nm and 100 nm...