Propylene glycol methyl ether acetate
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Names | |
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Preferred IUPAC name 1-Methoxypropan-2-yl acetate | |
Other names PGMEA; 1-methoxy-2-propanyl acetate; PM Acetate; Propylene glycol monomethyl ether acetate | |
Identifiers | |
3D model (JSmol) | |
ChemSpider | |
ECHA InfoCard | 100.003.277 |
PubChem CID | |
UNII | |
CompTox Dashboard (EPA) | |
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Properties | |
C6H12O3 | |
Molar mass | 132.159 g·mol−1 |
Appearance | Colorless liquid |
Density | 0.962 g/cm3 |
Melting point | −67 °C (−89 °F; 206 K) |
Boiling point | 146 °C (295 °F; 419 K) |
19.8g /100mL H2O(25 °C | |
log P | 0.26[1] |
Hazards | |
GHS labelling: | |
H226, H402 | |
NFPA 704 (fire diamond) | |
Flash point | 43 °C (109 °F; 316 K) |
333 °C (631 °F; 606 K) | |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa). |
Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA,[3] by Shell Chemical under the name methyl proxitol acetate,[4][5] and by Eastman under the name PM Acetate.[6]
In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers.[7] The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms,[8] due to its evaporation into ambient air.
References
[edit]- ^ "1-Methoxy-2-propyl acetate_msds". ChemSrc. Retrieved 28 September 2019.
- ^ GOV, NOAA Office of Response and Restoration, US. "PROPYLENE GLYCOL METHYL ETHER ACETATE - CAMEO Chemicals - NOAA".
{{cite web}}
: CS1 maint: multiple names: authors list (link) - ^ http://www.dow.com/scripts/litorder.asp?filepath=oxysolvents/pdfs/noreg/110-00588.pdf [bare URL PDF]
- ^ "Archived copy" (PDF). Archived from the original (PDF) on 2014-08-08. Retrieved 2014-08-01.
{{cite web}}
: CS1 maint: archived copy as title (link) - ^ "Shell Glycol Ethers and Acetates".
- ^ "Eastman EastaPure PM Acetate" (PDF). Eastman Chemical Company. 23 September 2019. Retrieved 23 September 2019.
- ^ "HMDS primer (hexamethyldisilazane), DEATS and PGMEA".
- ^ "Archived copy" (PDF). Archived from the original (PDF) on 2016-10-03. Retrieved 2016-07-29.
{{cite web}}
: CS1 maint: archived copy as title (link)