Burn-Jeng Lin

Burn-Jeng Lin (Chinese: 林本堅; born 1942) is a Taiwanese electrical engineer.

After graduating from National Taiwan University in 1963 with a degree in electrical engineering, Lin earned his doctorate in the same subject from Ohio State University in 1970.^[1][2]

During his tenure at IBM, which began in 1970,^[3] Lin became the first to propose immersion lithography, a technique that became viable in the 1980s.^[4][5] Lin left IBM to found his own company, Linnovation, Inc., in 1992. He began working for TSMC in 2000.^[6] Lin was named an IEEE Fellow in 2003, and granted an equivalent honor by the SPIE. The next year, SPIE gave Lin the inaugural Frits Zernike Award.^[7] In 2008, Lin was elected to membership of the United States National Academy of Engineering "for technical innovations and leadership in the development of lithography for semiconductor manufacturing."^[8] Lin received the IEEE Cledo Brunetti Award and IEEE Jun-ichi Nishizawa Medal in 2009 and 2013 respectively.^[2][5] In 2014, Lin was named a member of Academia Sinica.^[1][7] Upon his retirement from TSMC, he was offered a position on the faculty of National Tsing Hua University.^[7][9]